PLASMA GENERATING DEVICE IN WHICH AN INHALATION PORT IS FORMED AROUND PROJECTED PLASMA EXHALATION PORT

摘要

PPROBLEM TO BE SOLVED: To provide a plasma generating device in which a surface of a processing object is prevented from being damaged, by shutting down a heat generated in a lower electrode with an external housing, and a phenomenon that plasma is dispersed on a surface of the processing object is prevented by projecting a part of the lower electrode, and an exhalation is conducted near a place where the plasma treatment is done, and a byproduct generated at a time of the plasma treatment is removed instantly, and an inhalation port is formed around a projected plasma exhalation port. PSOLUTION: The plasma generating device is composed of a first electrode to which a power source discharging voltage is impressed, a first electrode part composed of a dielectric which is either attached to the first electrode or surrounds the first electrode and a second electrode which is arranged in separation with a predetermined distance under the first electrode part and has a plasma exhalation port extending downward. PCOPYRIGHT: (C)2008,JPO&INPIT