SOLVENT REFINING METHOD AND SOLVENT REFINING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a solvent refining method capable of refining (recycling) a solvent from a waste liquid (a mixed liquid containing a resist, the solvent and water) at a low heat energy cost.;SOLUTION: The solvent refining method includes a process for supplying the mixed liquid containing the resist, the solvent and water to one side of a separation membrane 15a so as to bring the same into contact with the one side of the separation membrane 15a and reducing the pressure on the other side of the separation membrane 15a to recover the resist not having permeated through the separation membrane 15a while selectively permeating the solvent and water through the separation membrane 15a to obtain a permeated gas and a process for removing water in the permeated gas to obtain the dehydrated solvent.;COPYRIGHT: (C)2009,JPO&INPIT