APPARATUS FOR PRODUCING RINSE WATER CONTAINING HYDROGEN PEROXIDE, AND METHOD FOR PRODUCING RINSE WATER CONTAINING HYDROGEN PEROXIDE

摘要

PPROBLEM TO BE SOLVED: To efficiently produce rinse water superior in cleaning capacity containing hydrogen peroxide. PSOLUTION: This production method includes supplying micro-bubbles of an oxygen-containing gas, which have a very small bubble diameter and a large surface area, to a cathode chamber 4 of a diaphragm-containing electrolysis tank 3 which has a diaphragm 8 between the cathode chamber 4 and an anode chamber 5; and generating the rinse water containing hydrogen peroxide in the cathode chamber 4. The production method increases a contacting efficiency of triphasic interfaces (bubble/electrolytic solution/electrode) in a cathode 6, which is important for producing hydrogen peroxide, enhances a production efficiency of hydrogen peroxide, and can efficiently produce the rinse water containing hydrogen peroxide. Thus produced rinse water containing hydrogen peroxide includes remaining micro-bubbles which collide with a contaminant depositing on the surface of an article to be cleaned when cleaning the article to detach the contaminant more efficiently than milli-bubbles, and consequently shows superior cleaning capacity. PCOPYRIGHT: (C)2008,JPO&INPIT