AGING TREATMENT METHOD AND AGING TREATMENT EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To sharply decrease failure incidence, after mounting of a chip, by obtaining progress of aging and applying appropriate treatment.;SOLUTION: The aging treatment equipment comprises a heater 2, a probe 4 conducting to a chip 1 and constant-current sources 5a, 5b, a change-over switch 7 for switching the current to the chip 1, in the order of an aging current Ie, feeble current Im, heating current Ih, and the feeble current Im, an amplifier 8, an S/H circuit section 9 and an A/D converter 10 for detecting the inter-electrode voltage of the chip 1, and a control section 11 that executes calculations. The chip 1 is heated by means of the heater 2 and after the aging current Ie is fed to the chip 1 under this state, the feeble current Im is fed to the chip 1 and the inter-electrode voltage Vm1 of the chip 1 is detected. Subsequently, the heating current Ih is fed to the chip 1, and the current to the chip 1 is returned to the feeble current Im, before the inter-electrode voltage Vm2 of the chip 1 is detected. The control section 11 executes operation, based on the Vm1 and Vm2 and determines the quality of the chip 1.;COPYRIGHT: (C)2008,JPO&INPIT