THREE-DIMENSIONAL PHASE MEASUREMENT METHOD, AND DIFFERENTIAL INTERFERENCE MICROSCOPE USED FOR SAME

摘要

PROBLEM TO BE SOLVED: To widely extend a method for reproducing a phase image from a differential interference image which can be utilized within only a range of the degree of a focus depth in a conventional method.;SOLUTION: The invention uses a differential interference microscope provided with a retardation changing apparatus, an imaging apparatus, a calculation apparatus and a focus driver, instructs the focus driver to scan a focus position within a certain range at a regular interval, captures two images having reversed retardation in the focus position, forms a difference image by implementing an operation for calculating a difference between two images, forms a phase distribution image in the focus position by deconvoluting the difference image with an optical response function, forms an absolute value image by implementing an operation for calculating an absolute value from the difference image, forms a mask image including pixels for providing the maximum value by comparing pixels in the absolute value image in all focus positions, and extracting phase distribution information in the focus position by using the mask image from the phase distribution image.;COPYRIGHT: (C)2008,JPO&INPIT