AC-RF SEPARATION FILTER OF HIGH AC AND HIGH RF POWER FOR HEATING ELECTROSTATIC CHUCK OF PLASMA REACTOR

摘要

PROBLEM TO BE SOLVED: To provide an RF block filter which blocks RF currents that flow to an RF ground part, through a substrate heating heater, from an RF power source that is applied to a lower electrode of a parallel flat type etching device.;SOLUTION: RF block filters 42 and 46 separate a two-phase AC power supply parts 40 and 44 from the power of at least 2kVp-p of HF frequency reactance-coupled with a resistive heating element. They guide an AC power of several kW at 60 Hz from the two-phase AC power supply 40 and 44 into the resistive heating element with no overheating. The two-phase AC power supply part comprises a pair of terminals, and the resistive heating element comprises a pair of terminals. A filter comprises a pair of cylindrical non-conductive envelopes, and a plurality of molten iron powder troid of permeability in order of about 10, that are coaxially stacked in each of the pair of cylindrical envelopes. The outside diameter of the troid is almost identical with the inside diameter of respective envelopes.;COPYRIGHT: (C)2008,JPO&INPIT