NONCONTACT TEMPERATURE MEASURING DEVICE, SAMPLE BASE, AND NONCONTACT TEMPERATURE MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To measure the in-plane temperature distribution of a sample stand with high resolution.;SOLUTION: A noncontact temperature measuring device 1 measures the temperature distribution of a sample stand and comprises: a sample base 10 placed on the sample stand 20, an electron beam source 2 for applying electron beams; a secondary electron detector 3 detecting secondary electrons induced by the irradiation of electron beams; and a temperature measurement section (signal processing section 7) for measuring temperature distribution, based on the induced secondary electrons. In the sample base 10, a plurality of combinations of resistors, having different temperature coefficients, is arranged one-dimensionally or two-dimensionally. A prescribed voltage is applied to each combination of resistors, a partial voltage according to the temperature of each resistor is generated, secondary electrons induced by the irradiation of electron beams are detected, and the temperature distribution of the sample stand is measured, based on the detected secondary electron beams.;COPYRIGHT: (C)2008,JPO&INPIT