LOW VACUUM ELECTRONIC-OPTICAL-SYSTEM IMAGE FORMING DEVICE AND LOW VACUUM ELECTRONIC-OPTICAL-SYSTEM IMAGE FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To neutralize charge due to irradiation of an electron beam to a sample and reduce generation of contamination by making the vicinity of the sample to have a low vacuum, form a superior image by detecting a high S/N ratio with a secondary electron detector of a high detection efficiency arranged on a high vacuum side, and improve length measurement precision of a length measurement object regarding a low vacuum electronic-optical-system image forming device and a low vacuum electronic-optical-system image forming method.;SOLUTION: This is provided with a sample chamber having a structure that the sample is arranged on a sample-traveling stand and the sample is arranged in a magnetic field of an objective lens to narrowly converge a beam or in the magnetic field leaked from the objective lens, a small diaphragm which is arranged in a part where emitted secondary electrons pass in the vicinity of the axis center of the magnetic field in the direction of the secondary electron detector when flat face scanning is carried out while the beam is irradiated to the sample and which is arranged between the low vacuum side and the high vacuum side, and a secondary electron detector arranged on the high vacuum side where the electrons have passed the diaphragm.;COPYRIGHT: (C)2008,JPO&INPIT