PROBLEM TO BE SOLVED: To easily evaluate sealing performance of sealing joint.;SOLUTION: The sealing joint performance evaluation device is provided with a frame part 4 having an opening 3; a plurality of vibration bodies 5a, 5b, 5c supported in the opening 3 of the frame part 4; a light-transmitting cap part 6 formed on an upper surface of the frame part 4; and a silicon substrate 7 joined to a lower surface of the frame part 4. The opening 3 is air-tightly sealed by the cap part 6 and the silicon substrate 7. Further, the vibration bodies 5a, 5b, 5c are vibrated, the vibration bodies 5a, 5b, 5c are irradiated with a light through the cap part 6, and the light reflected in the vibration bodies 5a, 5b, 5c is received. Resonance characteristic of the vibration bodies is measured from the received light, and a vacuum degree in the opening 3 is calculated from the measured resonance characteristic.;COPYRIGHT: (C)2008,JPO&INPIT
展开▼
