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In laser heat treatment of the baseplate, rapidity detection of the trouble which is imminent
In laser heat treatment of the baseplate, rapidity detection of the trouble which is imminent
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机译:在基板的激光热处理中,即将发生的故障的快速检测
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摘要
A system for thermal processing of a substrate includes a source of radiation, optics disposed between the source and the substrate to receive light from the source of radiation at the optics proximate end, and a housing holding the optics and having a void inside the housing isolated from light emitted from the source. A light detector is disposed within the void in the housing to detect light from the optics emitted into the housing and send a deterioration signal. The system further includes a power supply for the source of radiation, and a controller to control the power supply based on the deterioration signal from the light detector.
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