LASER APPARATUS, LIGHT IRRADIATION APPARATUS AND EXPOSURE APPARATUS, PHOTOPRODUCTION METHOD, EXPOSING METHOD AND PRODUCTION METHOD OF DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a pulse laser light of a predetermined wavelength having a thorough repetition frequency in which the spectrum width (wavelength width) has been caused to be a narrowband.;SOLUTION: The wavelength width of a pulse laser light LB having a predetermined wavelength irradiated from a solid laser apparatus 16 is substantially narrowed by a regulator 17. As the result, the wavelength width of the pulse laser light approaches a wavelength width to be satisfied in terms of causing the spectrum to be narrowband. Then, the pulse laser light is irradiated into a gas laser chamber 18 as a seed light and is amplified. As the result, a pulse laser light of a predetermined wavelength having a thorough repetition frequency in which the spectrum width (wavelength width) has been caused to be a narrowband at a required level is irradiated out of the gas laser chamber 18.;COPYRIGHT: (C)2008,JPO&INPIT