SYSTEM AND METHOD FOR NONLINEARITY COMPENSATION OF INTERFEROMETER

摘要

PROBLEM TO BE SOLVED: To provide a system and a method for compensating a nonlinearity of a position data of the interferometer by using a digital numerical processing.;SOLUTION: The system and the method (200) for compensating the nonlinearity of the position data of the interferometer (202) receive a group (600) of the digital position values (300). A first group of the digital position values is processed digitally (208), and a plurality of data values (210) are generated. The plurality of data values are processed digitally (212), and at least one quasi-static nonlinear parameter (214) is generated. On the basis of at least one nonlinear parameter, a second group of the digital position values is compensated.;COPYRIGHT: (C)2008,JPO&INPIT