Determination of root cause problems and tools matching problem related to the measurement system

摘要

For determining whether or not matching the tools including the measurement system of one other, methods, systems, and issues under test measurement system (MSUT) is to provide at least a program. A1 The present invention provides a single tool precision, non-linearity of the tool pairs tool, and including a pair of tool offset tool, a realistic parameters for analyzing the matching problem. Then, combined in a single value of these parameters, metrics tool matching accuracy of the final result is given. The present invention is, (s10), and a (s4) method for determining a metric of tools measurement accuracy method for determining the root cause of the matching problem. [Selection] Figure Figure 1