Catadioptric objective lens of high NA ultra compact with aspheric

摘要

Method for imaging a sample and the objective lens of higher NA adopted for use when imaging a sample is provided. Objective lens, the field of view of at least one directed to the lens unit having a focusing lens at least one configured to receive the light energy, so as to form an intermediate image, receives the intermediate image and to provide an intermediate light energy a lens, to receive the intermediate light energy, and a Mangin mirror arrangement directed to hit the sample light energy. One or more elements may be aspherical. In some examples, the objective lens is able to provide a spectral bandwidth uncorrected 193-266 nm approximately, to provide a numerical aperture greater than 0.9. Diameter less than 100 millimeters element may fit into a standard microscope. The field lens may be formed of a material different from that of the lenses of at least one other of the objective lens in addition, may be equipped with two or more lenses.