SHAPE PROCESSING CONTROL TECHNOLOGY FOR LOCALLY REMOVING AND CUTTING CARBON NANO MATERIAL BY ELECTRON BEAM, AND APPARATUS THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a technology and an apparatus capable of locally removing and cutting a carbon nano material in an arbitrary position by using electron beams by means of the introduction of a carbon reactive gas, thereby processing the carbon nano material into an arbitrary shape.;SOLUTION: In the technology and the apparatus, the carbon nano material is processed into the arbitrary shape by introducing the gas containing an atom reactive with carbon atom, scanning the electron beams, whose acceleration voltage and irradiation current are adjusted, on the arbitrary position of the carbon nano sample placed in a working section to locally irradiate the carbon nano material in the state of controlling the gas introducing quantity by a controller and controlling the position of a gas nozzle for introducing the gas into the working section by a control stage, thereby locally destructing the atomic bonding structure of the carbon nano material to locally remove and cut the carbon nano material.;COPYRIGHT: (C)2008,JPO&INPIT