PROBLEM TO BE SOLVED: To provide a shape measuring method, an appearance inspection method, a shape measuring device, and an appearance inspection device, capable of suppressing an influence of deformation of a member, and measuring accurately a projection amount of a projection part which may be generated on the member.;SOLUTION: This shape measuring method, which is a shape measuring method for measuring the outline shape of an approximately flat plane surface of a flat member, has a reference position acquisition process for measuring a vertical reference position which is a position in the vertical direction to the plane surface in each reference domain among a plurality of reference domains set on the plane surface, a position measuring process for measuring a measuring part position which is a position in the vertical direction to the plane surface of a measuring object part on the plane surface, and a height calculation process for determining the height of the measuring object part by comparing the measuring part position with a vertical reference position in a reference domain having the shortest distance in the plane surface direction from the measuring object part among vertical reference positions acquired in the reference position acquisition process.;COPYRIGHT: (C)2008,JPO&INPIT
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