SUBSTRATE REPAIR SYSTEM, SUBSTRATE REPAIR METHOD, PROGRAM, AND COMPUTER READABLE RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a substrate repair system in which the tact time of repair is improved and efficient repair processing can be performed by preventing the conduction of an unnecessary repair processing.;SOLUTION: The substrate repair system 1 includes a defect information acquisition unit 2 which acquires the defect information over the entire area of an object substrate 9, a repair unit 3 which has one or more droplet discharge units 6 for dropping droplets to a defective part on the object substrate 9 based on the defect information acquired by the defect information acquisition unit 2, and a repair determination unit 4 which determines the necessary/unnecessary of the repair operation by the repair unit 3 every object panel 9 based on the defect information acquired by the defect information acquisition unit 2.;COPYRIGHT: (C)2008,JPO&INPIT