EXPOSURE SYSTEM WITH POLARIZATION FUNCTION

摘要

PROBLEM TO BE SOLVED: To improve polarization characteristic of an exposure system with polarization function without being affected by aberration, light scattering, uneven polarization, flare, or the degradation of optical characteristics.;SOLUTION: The exposure system is provided with a light source 1, a projection exposure system 2, and an optical path system 3 that optically combines the light source 1 and the projection exposure system 2. At least one of a reflective prism 4 with polarization function, a reflection mirror 5 with polarization function, and a refractive prism 6 with polarization function, is provided in the optical path of the optical path system 3.;COPYRIGHT: (C)2008,JPO&INPIT