MEASUREMENT CONTROLLER, SURFACE PROPERTY MEASURING INSTRUMENT, AND MEASUREMENT CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional measuring instrument, capable of restraining an overshoot when a force sensor and a measured object contact, without lowering the measurement efficiency, using a simple constitution.;SOLUTION: An approach control means 234 for the three-dimensional measuring instrument makes a position control loop RP effective and drives a drive actuator 133, by position control to make the force sensor 1 reach an approaching position. A contact control means 235 controls a switch 227 for making a force control loop RF effective, when that the force sensor 1 has reached the approaching position is recognized, and makes the drive actuator 133 drive by force control to bring the force sensor 1 into contact with the measured object.;COPYRIGHT: (C)2008,JPO&INPIT