Irradiating the measuring beam to light wave interference measuring method of the curved surface, and interferometer device null

摘要

PROBLEM TO BE SOLVED: To perform easily and stably shape measurement of the whole measuring region on the surface to be inspected by determining the shape of a starting point region and the tilt angle of an adjacent region from an image of a starting point interference fringe, and by acquiring successively an adjacent interference fringe corresponding to the adjacent region by performing inclination adjustment of the inspection surface of the tilt angle portion.;SOLUTION: After generating the first starting point interference fringe by adjusting the tilt attitude of the surface to be inspected 27a to a reference plane 21a, a starting point interference fringe analysis procedure for determining the shape of the starting point region based on the starting point interference fringe, a tilt angle calculation procedure for calculating the tilt angle of the adjacent region based on the shape of the starting point region, and an adjacent interference fringe generation procedure for generating the adjacent interference fringe by adjusting the tilt attitude of the surface to be inspected 27a so that the tilt angle of the adjacent region becomes approximately zero degree are performed repeatedly at every time when the adjacent region is replaced by a next starting point region, to thereby determine successively the shapes classified by the region of the surface to be inspected. Then, the shape of approximately the whole region in the measuring region on the surface to be inspected 27a is determined by connecting each shape classified by the region by a synthetic aperture method.;COPYRIGHT: (C)2005,JPO&NCIPI