ENERGY TRANSFER CAPILLARY, ENERGY TRANSFER APPARATUS, AND METHOD OF FORMING ENERGY TRANSFER CAPILLARY

摘要

PROBLEM TO BE SOLVED: To provide an energy transfer capillary which performs an energy transfer by charged particles in a three-dimensional manner more precisely.;SOLUTION: The energy transfer capillary 1 for transferring energy by charged particles to a target is equipped with a main body part 3 of the capillary which is surrounded by cylindrical side walls and has a hollow part where the charged particles pass through in the direction of the axis of the capillary and a lid body part 2 for closing an open end of the hollow part at an end part of the main body part of the capillary. The hollow part 4 formed as a closed space in the main body part 3 by the lid body part 2 is kept in a vacuum state, and the thickness of the lid body part 2 is determined in a manner to perform the energy transfer by charged particles to the target in a region to a position at a prescribed distance from the outer surface of the lid body part.;COPYRIGHT: (C)2008,JPO&INPIT