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Method and the system which process the baseplate in the high pressure fluid with the initiator making use of the peroxide based process component
Method and the system which process the baseplate in the high pressure fluid with the initiator making use of the peroxide based process component
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机译:利用引发剂利用过氧化物基工艺组分在高压流体中处理基板的方法和系统
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摘要
The baseplate (105,205) method and the system in order to process (100,200) you explain in the super pressure fluid like carbon dioxide which is super critical state. The process component which contains process peroxide, is introduced into the high pressure fluid in order to process the baseplate surface. This hydrogen peroxide based component is used with the initiator. Here, the initiator promotes the formation of the radical of process peroxide.
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