The minute mass measurement equipment where the oscillating circuit is applied and the cantilever where

摘要

PROBLEM TO BE SOLVED: To provide a micro-mass measuring instrument to which an oscillation circuit is adapted, and to provide a micro-mass measuring method.;SOLUTION: This micro-mass measuring instrument, to which the oscillation circuit 60 is adapted, includes a cantilever 50 to which a specimen adheres, the piezoelectric element 53 provided on the cantilever 50, the oscillation circuit 60 for actively vibrating the cantilever 50 and providing the changed resonance frequency of the cantilever 50 caused by the specimen and a frequency measuring instrument 65 for measuring the resonance frequency of the cantilever 50. Since the active driving and resonance frequency of the cantilever 50 are together measured using a single piezoelectric element, it is unnecessary to independently provide an oscillator and equipment for measuring the change quantity of resonance frequency. By this constitution, the measuring instrument is simplified and the micro-cantilever 50 is made extremely small-sized using an MEMS process technique.;COPYRIGHT: (C)2005,JPO&NCIPI