PROBLEM TO BE SOLVED: To provide a multilayer film reflective mirror for ultraviolet light reflection excellent in environmental resistance and with little possibility of occurence of cracks on the surface. ;SOLUTION: A multilayer film reflective mirror reflecting a wavelength of an ultraviolet area consists of a laminated film formed by laminating alternately films with a low refractive index and with a high refractive index on a substrate of the reflective mirror, and a buffer film which is formed for the purpose of making buffer an internal stress generated in the laminated film, and which is formed in the laminated film.;COPYRIGHT: (C)2001,JPO
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