SHOWER PLATE SINTERED INTEGRALLY WITH GAS DISCHARGING HOLE MEMBER AND ITS MANUFACTURING METHOD

摘要

PPROBLEM TO BE SOLVED: To provide a shower plate wherein a gas discharging hole member (ceramics member or porous gas circulation body) arranged in a vertical hole of the shower plate for preventing plasma back flow is integrally sintered and joined without clearance, it is hard to drop out from the vertical hole when using the shower plate, and there is no change in gas discharging quantity from each of vertical holes, thus preventing the generation of plasma back flow, and highly efficient excitation of plasma can be produced. PSOLUTION: The shower plate 105 is arranged in a processing chamber 102 of a plasma processing apparatus, and it discharges plasma excitation gas to generate plasma in the processing chamber 102. A ceramics member having a plurality of gas discharging holes with a diameter of 20 to 70 μm and/or a porous gas distribution body with air holes of maximum diameter of 75 μm or less communicating in the direction of gas distribution are integrally sintered/joined and arranged in a number of vertical holes as a discharging route of the plasma excitation gas. PCOPYRIGHT: (C)2008,JPO&INPIT