Surface texture measuring probe, the surface texture measuring method and apparatus using the same

摘要

PROBLEM TO BE SOLVED: To rapidly process a plurality of data collection with good reproducibility in a single action regardless of the skill difference of a measurer who operates a probe.;SOLUTION: In a measuring device constituted to transfer data acquired by each measuring means, to a body 2 detachably connected to the probe in an optical communication system and to display the data, the probe is provided with a measurement control circuit 23 for sequentially control each measuring means to measure, and a data processing circuit 24 for carrying out the plurality of data collection on the surface properties and transmit-receive processing with the body. When a spring 3 mounted into the probe is compressed to press a measuring end face 10, detecting sensors 6, 7 for detecting the contact state of an examined object with a surface part 8 are arranged in at least two parts of the measuring end face, and in the further pressed state of the measuring end face into a predetermined position, a measuring start signal is generated to carry out the plurality of data collection by each measuring means in a single action under the continuous control of a pressing control circuit.;COPYRIGHT: (C)2006,JPO&NCIPI