Program classification system, yield management system, classification method, and substrate manufacturing method

摘要

PPROBLEM TO BE SOLVED: To provide a classifying apparatus capable of easily classifying specific types of defects. PSOLUTION: The classifying apparatus 1 comprises an imaging part 2 for imaging a substrate 9; an arithmetic part 4 for receiving the input of an image signal from the imaging part 2; and a computer 5. An arithmetic part 4 stores an image to be inspected acquired by the imaging part 2 and a reference image. The arithmetic part 4 creates a defect region image indicating a defect region from the image to be inspected and the reference image. The computer 5 generates a division region image indicating the region of a wiring pattern on the substrate 9 from the reference image. A defect feature amount extracting part 502 performs logical operation for each pixel of the defect region image and the division region image, to determine an evaluation value indicating the state of superposition between the defect region and a division region. A classifier 503 classifies defects, on the basis of the evaluation value. PCOPYRIGHT: (C)2004,JPO