The echelle spectrometer which improves the ability utilization of the detector by using two spectrometer arrangements

摘要

This invention regards the spectrum of 1st wave length zone of radiation from the emission radiation source the detector (42) the spectrometer which is drawn up on (14) from the spectrometer arrangement which is formed (10). In addition as for this arrangement, spectrometer arrangement (10) principal dispersed direction of the radiation which inserts (46) to the echelle lattice for spectral resolution (36) with; The side dispersed direction which forms angle making use of the spectral resolution of radiation, the echelle lattice (36) vis-a-vis principal dispersed direction (48), plural it was separated (52) two dimensional spectrum which it possesses (50), in order for it to be possible, to be drawn up, the dispersing element which is separated (34) with; The incident air gap (20) passing, spectrometer arrangement (10) the radiation which inserts the image formation aspect (40) image formation the image formation optical element which is done (24 and 38) with; The image formation aspect (40) the surface detector which is formed from two dimensional arrangement of the plural inspection elements inside (42) with the empty it is constituted. Invent arrangement, the spectrum of the 2nd wave length zone which differs, from the 1st wave length zone of radiation from the emission radiation source (68) the identical detector (42) in order to draw up on, at least already one dispersing element (64) and the other image formation optical element (60 and 66) from the other spectrometer which is formed (12), it is characterized by having. The spectrum is separated on the detector, spatially, or timewise.