Output characteristics analysis method of impedance matching device and impedance matching device, as well as impedance matching device of output end characterization system,

摘要

PROBLEM TO BE SOLVED: To provide an impedance matching device capable of accurately analyzing electric characteristics of output terminals.;SOLUTION: The impedance matching device is provided with an input side detector 2 which detects RF voltage signals or the like being input through an input terminal 1a, an RF voltage detector 4 which detects RF voltage signals being output from the output terminal 1b, and a control section 3 which controls variable capacitor VC3,VC4 based on information detected by the input side detector 2 thereby matching impedances between a high-frequency power source connected to the input terminal 1a and a load connected to the output terminal 1b. The control section 3 stores characteristic data being measured previously and representing a relation between an output impedance Zo and variable values of the variable capacitor VC3, VC4 into an EEPROM 15 and analyzes electric characteristics such as the output impedance Zo, the RF voltage Vo, the RF current Io or the like at the output terminal 1b on the basis of detection values detected by the RF voltage detector 4, the characteristic data stored in the EEPROM 15 and values of the variable capacitor VC3, VC4 controlled when the impedance matching between the high-frequency power source and the load is carried out.;COPYRIGHT: (C)2004,JPO