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It is used for detecting or fixed quantity the halogenation vapor chemical compound, chemical compound, the meso structuration porous hybrid organic - inorganic material and the sensor
It is used for detecting or fixed quantity the halogenation vapor chemical compound, chemical compound, the meso structuration porous hybrid organic - inorganic material and the sensor
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机译:用于检测或定量检测卤代蒸气化合物,化合物,介孔结构的多孔杂化有机-无机材料和传感器
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摘要
The present invention relates to compounds which can go to make up mesostructured porous hybrid organic-inorganic materials (MPHOIMs) and can serve, within these materials, as probe molecules for the detection or quantitative determination of halogenated gaseous compounds. It also relates to MPHOIMs in which these compounds are grafted by covalent or iono-covalent bonding, to a process for manufacturing these MPHOIMs, and also to chemical sensors for the detection or quantitative determination of halogenated gaseous compounds and comprising these MPHOIMs as sensitive materials. The invention applies, in particular, to the detection and quantitative determination of halogenated gaseous compounds used in the microelectronics field and, more especially, halogenated boron complexes.
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