首页> 外国专利> It is used for detecting or fixed quantity the halogenation vapor chemical compound, chemical compound, the meso structuration porous hybrid organic - inorganic material and the sensor

It is used for detecting or fixed quantity the halogenation vapor chemical compound, chemical compound, the meso structuration porous hybrid organic - inorganic material and the sensor

机译:用于检测或定量检测卤代蒸气化合物,化合物,介孔结构的多孔杂化有机-无机材料和传感器

摘要

The present invention relates to compounds which can go to make up mesostructured porous hybrid organic-inorganic materials (MPHOIMs) and can serve, within these materials, as probe molecules for the detection or quantitative determination of halogenated gaseous compounds. It also relates to MPHOIMs in which these compounds are grafted by covalent or iono-covalent bonding, to a process for manufacturing these MPHOIMs, and also to chemical sensors for the detection or quantitative determination of halogenated gaseous compounds and comprising these MPHOIMs as sensitive materials. The invention applies, in particular, to the detection and quantitative determination of halogenated gaseous compounds used in the microelectronics field and, more especially, halogenated boron complexes.
机译:本发明涉及可以构成介孔结构的多孔杂化有机-无机材料(MPHOIM)的化合物,并且可以在这些材料中用作用于检测或定量测定卤代气态化合物的探针分子。本发明还涉及其中通过共价键或离子共价键接枝这些化合物的MPHOIM,制备这些MPHOIM的方法,还涉及用于检测或定量确定卤代气态化合物并包括这些MPHOIM作为敏感材料的化学传感器。本发明尤其适用于检测和定量测定在微电子领域中使用的卤代气态化合物,尤其是卤代硼配合物。

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