Decisive method and application membrane formation device of processing parameter of application membrane formation

摘要

P To provide a method of deciding a treatment parameter for coated film formation by which in-plane uniformity of the thickness of a coated film can be improved by easily setting treatment parameters for a method of forming the coated film ON a substrate by linearly applying coating liquid to the substrate by intermittently sending the substrate in the X-direction while a coating liquid nozzle is scanned in the Y-direction and drying the formed coated film under a pressure- reduced condition. PSOLUTION: By paying attention to that the coated film of the coating liquid has an appropriate thickness regardless of the solid concentration of the coating liquid and the solid concentration of the coating liquid at which a target film thickness is obtained is found after finding the value of an appropriate thickness. Then scanning pitch and a flow rate discharged from the coating liquid nozzle are found and the optimum diameter of the nozzle is decided. Thereafter and the optimum value of starting time at which the solvent of the coating liquid vigorously vaporizes when the coated film is dried under the pressure-reduced condition is found. Next, the optimum temperature of the substrate, the optimum vaporizing time of the solvent and the optimum gap between a rectifying plate and the substrate are found in this order. PCOPYRIGHT: (C)2003 and JPO