From the deep section inside the open stoma

摘要

PROBLEM TO BE SOLVED: To provide a C/C crucible for pulling up single crystal which suppresses formation of SiC, has long useful time period and is excellent in durability and to provide its manufacturing method.;SOLUTION: The C/C crucible is constituted by forming an functionally gradient organization in which the inside of an open pore of the C/C material is filled with pyrolytic carbon deposited in a gas phase by CVI method, a layer filled with the pyrolytic carbon gradually changes from sparse organizational structure at a depth part in the open pore to dense organizational structure at a surface part therein. In order to manufacture the C/C crucible, carbon fiber is impregnated with a thermosetting resin, a cured crucible molding is subjected to calcination and carbonization in non-oxidizing atmosphere to obtain the C/C material. The C/C material is used as a base material and the base material is set in a CVI device and pressure and temperature in a system are changed by stages to control pyrolysis condition of raw material hydrocarbon. Thereby pyrolytic carbon layer of the functionally gradient organization in which the layer filled with the pyrolytic carbon gradually changes from sparse organizational structure at the depth part to dense organizational structure at the surface part in the open pore of the C/C material, is formed.;COPYRIGHT: (C)2002,JPO