Optics optical characteristic detecting method and optical characteristic detecting device including a lens and other optical elements

摘要

PROBLEM TO BE SOLVED: To improve accuracy in adjustment, and to facilitate adjustment without experiencing an out-of visual field by generating interference fringes to optical beams by means of a diffraction grating piece, which is arranged at the light converging position of the beams from an optical head, projecting the fringes to an imaging device by means of an observation optical system, adjusting the optical system of the head based on the projected picture and detecting the phase information of the wave front of the fringes. ;SOLUTION: A beam spot converged by the objective lens 7 of an optical head 1 is reflection-diffracted by a grooved disk piece 8, and interference fringes are generated by superimposing 0-order diffracted light and ±1 st-order diffracted light in a transversely shifted manner. The fringes are projected onto the light receiving surface of a camera 15 by an observation optical system 70 made of lenses 12 and 13 and image formed. The projected image is then aberration-analyzed by a picture processing device 16 and the head 1 is adjusted so that aberration is minimized. Thus, accuracy in the adjustment of the head 1 is improved and no out-of visual field is experienced even though the adjustment, in which the angle of the lens 7 is slightly varied, is conducted because the visual field is wide.;COPYRIGHT: (C)1999,JPO