The electrostatic die actuator, the liquid drop emission head and its production manner, the ink cartridge, the deformation possible diaphragm making the specified gap this in the micropump

摘要

PROBLEM TO BE SOLVED: To solve a problem that characteristic variation is significant and reliability is insufficient.;SOLUTION: Electrodes 24 are provided on a base substrate 21 while being divided by electrode dividing grooves 26 which are then filled with an insulating film 27 and flattened. Furthermore, a sacrifice layer is formed and after a diaphragm 22 is formed, the sacrifice layer is removed by etching to form a gap 23 thus constituting an actuator substrate 11. Surface of the actuator substrate 11 is formed flatly on the diaphragm 22 side.;COPYRIGHT: (C)2004,JPO