From automatic detection sequence file compilation method of scanning electron microscope and automatic measuring of length sequence methodological null CAD data

摘要

PROBLEM TO BE SOLVED: To form an automatic measuring sequence file, without using a wafer and improve a serviceability ratio with respect to a method for forming an automatic sequence file in a scanning electron microscope. ;SOLUTION: Design data d0 is fetched from CAD data, and pattern data d1 in a certain region from the design data d0. A pattern outline edge data d2 is extracted on the basis of pattern data d1. Then, a processing (d) for specifying a measuring position (A) from the pattern outline edge data d2, and a step for setting template edge data from the pattern outline edge data d2 are included.;COPYRIGHT: (C)2000,JPO