COMPOSITE SLIDING STRUCTURE COMPRISING SEGMENT STRUCTURE HARD FILM AND SOLID LUBRICATION LAYER OR FLUID LUBRICATION LAYER ON SUBSTRATE, AND METHOD FOR PRODUCING THEM

摘要

An object of this invention is to provide the composite sliding structure provided with the outstanding low friction coefficient and abrasion resistance. The composite sliding structure 1 of the present invention includes a segment structure hard film 2 in which hard films are spaced apart from each other on the surface of a substrate 4 and segments formed between the segment structure hard films 2 and 2. The solid lubricating layer 3 including the groove 5 and covering and filling the segment groove 5 is included, or the fluid lubricating layer 3 ′ impregnating and filling the segment groove 5 is included. In addition, in the method of manufacturing the composite sliding structure 1 of the present invention, the segment structure hard film 2 in which the hard films are arranged apart from each other on the surface of the substrate 4 is formed by physical vapor deposition or chemical vapor deposition. Covering the solid groove 3 or impregnating the fluid lubricating layer 3 ′ in the segment groove 5, which is formed by the phase growth method and spaced apart between the segment structure hard films 2 and 2. Consists of.