Optical image acquisition device, optical image acquisition method, and mask inspection equipment

摘要

PPROBLEM TO BE SOLVED: To provide a means of acquiring an optical image without causing defocusing while improving traceability to a pattern. PSOLUTION: An optical image acquisition device is equipped with a mean film thickness arithmetic circuit 250 which inputs design shape data on a pattern and film thickness information on the pattern and calculates a mean film thickness in a designated region based upon the design shape data on the pattern and the film thickness information on the pattern, and an optical image acquisition section 150 which acquires an optical image by adjusting a focusing position to the mean film thickness when an optical image of a region of a mask pattern corresponding to the designated region is acquired by using the mask pattern generated based upon the design shape data on the pattern and the film thickness information on the pattern. PCOPYRIGHT: (C)2007,JPO&INPIT