To supply the signal to the prober and the aforementioned prober which do

摘要

PROBLEM TO BE SOLVED: To allow change of decision reference for pass or fail without interruption of test, by changing a limit value automatically or according to operator's requirement during the test. ;SOLUTION: A binning which user can set freely is described in one limit file 10, and pass/fail reference and range of effective measurement value are selected out of a plurality of user binnings. In a test process, pass/fail result data is always monitored, for automatically changing decision conditions using the result. For example, if a range of user BIN1, before change of the decision conditions, specified as a passing specification is too narrow and expected passing rate is too low, the limit value in the limit file 10 is changed, and user BIN2 is specified as a passing specification. Thus, at measurement after judging condition is changed, most of measuring results are regarded as passing and an expected passing rate can be obtained.;COPYRIGHT: (C)1999,JPO