Being the brightness calculation manner in the brightness calculation device which the survey instrument which inspects the panel for the above-mentioned display by

摘要

PROBLEM TO BE SOLVED: To provide an inspection system for detecting a flaw with high precision correlated with visual sensitivity by calculating the brightness value of a flaw pixel, a brightness calculation system, and to provide a brightness calculation method.;SOLUTION: The brightness calculation system is equipped with: a normal brightness estimation part 18 for calculating a normal brightness value being the brightness value when a normal pixel is imaged by an imaging element showing an abnormal brightness value; a flaw pixel ratio calculation part 20 for calculating a flaw pixel ratio being the ratio of the area in the imaging range of a certain imaging element of a flaw pixel opening part being the cause of the abnormal brightness value and the area of the imaging range of; and a brightness correction part 19 for calculating the brightness value of the flaw pixel opening part by multiplying the difference between the abnormal brightness value and the normal brightness value by the reciprocal of the flaw pixel ratio and adding a standard brightness, which is the normal pixel having the same color as the flaw pixel, to the obtained value.;COPYRIGHT: (C)2008,JPO&INPIT