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Maintenance method of exposure device, exposure device, device production method, liquid collection component for maintenance of immersion exposure device
Maintenance method of exposure device, exposure device, device production method, liquid collection component for maintenance of immersion exposure device
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机译:曝光装置的维护方法,曝光装置,装置的制造方法,浸入式曝光装置的维护用集液部件
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摘要
Maintenance method of the exposure device which can prevent the fact that the liquid remains behind is offered. The liquid (LQ) the absorption possible liquid collection component (60) the baseplate holder (PH) mounting on, the liquid which remains behind (LQ) you collect.
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