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Electromigration-Resistant Flip-Chip Solder Joints

机译:防电迁移倒装芯片焊点

摘要

A semiconductor device contact structure practically eliminating the copper diffusion into the solder as well as the current crowding at the contact with the subsequent electromigration in the solder. A column-like electroplated copper stud (108) is on each contact pad. The stud is sized to provide low, uniform electrical resistance in order to spread the current from the contact to an approximately uniform, low density. Preferably, the stud height (108a) is at least ten times the thickness of the copper interconnect layer (104). Stud (108) is capped by an electroplated nickel layer (109) thick enough (preferably about 2 μm) to suppress copper diffusion from stud (108) into solder body (120), thus practically inhibiting intermetallic compound formation and Kirkendall voiding.
机译:半导体器件的接触结构实际上消除了铜扩散到焊料中,以及消除了电流在接触时拥挤,以及随后焊料中的电迁移的问题。每个接触垫上都有一个柱状电镀铜柱( 108 )。螺柱的尺寸可提供低而均匀的电阻,以便将电流从触点扩散到大致均匀的低密度。优选地,螺柱高度( 108 a )至少是铜互连层( 104 )的厚度的十倍。螺柱( 108 )被足够厚(最好约为2μm)的电镀镍层( 109 )覆盖,以抑制铜从螺柱( 108 >)进入焊料体( 120 ),从而实际上抑制了金属间化合物的形成和Kirkendall的空洞化。

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