Pressure Sensor with Active and Passive Acceleration Compensation

摘要

An acceleration-compensated pressure pick-up, for example for the measurement of dynamic processes in gaseous or liquid media, comprises an external housing and a pre-assembled inner part having a flange at its assembly end. The inner part is securely fixed to the housing only at the flange. A first mass is connected via a first resilient connection to the flange, and a second mass is connected to the flange via a second resilient connection. A first measurement crystal is inserted under pre-tension between the two masses. A third mass and a compensation crystal are arranged between the first measurement crystal and the second mass, and the compensation crystal is electrically connected in opposition to the first measurement crystal. The two rigidities of the resilient connections and the three masses are matched so that the measurement values which can be determined at the crystals due to an axial acceleration acting on the housing compensate each other.