首页>
外国专利>
PLATE TYPE CAPACITIVE SENSOR FOR FIVE-DIMENSIONAL DISPLACEMENT MEASUREMENT
PLATE TYPE CAPACITIVE SENSOR FOR FIVE-DIMENSIONAL DISPLACEMENT MEASUREMENT
展开▼
机译:平板式电容传感器,用于五维位移测量
展开▼
页面导航
摘要
著录项
相似文献
摘要
Disclosed herein is a plate type capacitive sensor for five-dimensional displacement measurement that is capable of simultaneously measuring five-dimensional movement of an object, which includes the horizontal movement, the vertical movement, and the tilt of the object. The plate type capacitive sensor for five-dimensional displacement measurement comprises a plate located adjacent to an object to be measured, and a ground part, a first guard part, a displacement measuring sensor, and a second guard part, which are stacked on the plate in consecutive order. The plate may be made by machining or made of a printed circuit board (PCB).
展开▼