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Silicon carbide single crystals with low boron content

机译:低硼含量的碳化硅单晶

摘要

In a crystal growth method, an enclosed growth crucible is provided inside of a growth chamber. The growth crucible has polycrystalline source material and a seed crystal disposed in spaced relation therein. The interior of the growth crucible is heated whereupon a temperature gradient forms between the source material and the seed crystal. The temperature gradient is sufficient to cause the source material to sublimate and be transported to the seed crystal where it precipitates on the seed crystal. A gas mixture is caused to flow into the growth crucible and between the polycrystalline source material and an interior surface of the growth crucible. The gas mixture reacts with an unwanted element in the body of the growth crucible to form a gaseous byproduct which then flows through the body of the growth crucible to the exterior of the growth crucible.
机译:在晶体生长方法中,将封闭的生长坩埚设置在生长室内部。生长坩埚具有多晶源材料和以隔开关系设置在其中的籽晶。生长坩埚的内部被加热,从而在原料和籽晶之间形成温度梯度。温度梯度足以使源材料升华并传输到籽晶,然后在籽晶上沉淀。使气体混合物流入生长坩埚中,并在多晶源材料和生长坩埚的内表面之间流动。气体混合物与生长坩埚主体中的不需要的元素反应,形成气态副产物,其随后流过生长坩埚主体到达生长坩埚的外部。

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