RESONATOR CIRCUIT HAVING REDUCED EFFECTS OF PARASITIC FEED-THROUGH CAPACITANCE

摘要

Parasitic feed-through capacitance effects in a resonator circuit are reduced by separating the resonator signal from the feed-through capacitance signal and then detecting the resonator signal with comparator circuitry. In specific embodiments, the separation of the resonator signal from the feed-through capacitance signal is effected by serial integrator and differentiator circuitry or by trans-impedance amplifier circuitry. The comparator circuitry can include control/delay circuitry for enabling the comparator at a correct time when feed-through capacitance signal has dissipated. The invention can be implemented using microelectromechanical sensors (MEMS) in a strain gauge function.