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SILICON ARRAYED WAVEGUIDE GRATING DEVICE FOR REDUCING EFFECTIVE REFRACTIVE INDEX VARIATION OF OPTICAL WAVEGUIDE ACCORDING TO TEMPERATURE
SILICON ARRAYED WAVEGUIDE GRATING DEVICE FOR REDUCING EFFECTIVE REFRACTIVE INDEX VARIATION OF OPTICAL WAVEGUIDE ACCORDING TO TEMPERATURE
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机译:用于降低光学波导根据温度的有效折光率指数变化的硅阵列波导光栅分级装置
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摘要
Provided is a silicon array waveguide grating (AWG) device comprising a silicon array waveguide in which a plurality of optical waveguides formed of a lower cladding layer, a silicon core, and an upper cladding layer are arranged, wherein the variation of the refractive index of the silicon core is positive, and the upper cladding layer is formed of polymer, the variation of refractive index of which according to temperature is negative, which is opposite to the silicon core, and the cross-section of the silicon core varies between different areas to adjust the variation of the effective refractive index of the optical waveguide according to temperature.
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