Methods of Forming Carbon Nano-Tube Wires on a Catalyst Metal Layer and Related Methods of Wiring Semiconductor Devices Using Such Carbon Nano-Tube Wires

摘要

In a method of forming a carbon nano-tube, an oxidized metal layer is formed on a substrate. An insulation layer having an opening is formed on the oxidized metal layer to expose a surface of the oxidized metal layer through the opening. The oxidized metal layer exposed through the opening is converted into a catalyst metal layer pattern for allowing a carbon nano-tube to grow from the catalyst metal layer pattern. The carbon nano-tube grows from the catalyst metal layer pattern to form a carbon nano-tube wire in the opening. Thus, the carbon nano-tube may not grow between the insulation layer pattern and the catalyst metal layer pattern.