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PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY HAVING A RADIATION DETECTOR FOR SPATIALLY RESOLVED REGISTRATION OF ELECTROMAGNETIC RADIATION
PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY HAVING A RADIATION DETECTOR FOR SPATIALLY RESOLVED REGISTRATION OF ELECTROMAGNETIC RADIATION
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机译:具有放射探测器的微成像投影投影工具,用于电磁辐射的空间分辨配准
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摘要
A microlithography projection exposure tool with a radiation detector for the locally resolved recording of electromagnetic radiation. The radiation detector comprises: a solid state body which is configured to multiply electric charge and a collector which is configured to determine the location of the multiplied electric charge by means of charge division.
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