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METHOD AND SYSTEM FOR FABRICATION OF INTEGRATED TUNABLE/SWITCHABLE PASSIVE MICROWAVE AND MILLIMETER WAVE MODULES
METHOD AND SYSTEM FOR FABRICATION OF INTEGRATED TUNABLE/SWITCHABLE PASSIVE MICROWAVE AND MILLIMETER WAVE MODULES
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机译:制造可调谐/可切换的无源微波和毫米波模块集成的方法和系统
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摘要
An interconnect module and a method of manufacturing the same. The method of making an interconnect module on a substrate comprises forming an interconnect section on the substrate. The interconnect section comprises at least two metal interconnect layers separated by a dielectric layer. The method further comprises forming a passive device on the substrate at a location laterally adjacent to the interconnect section. The passive device comprises at least one moveable element comprising a metal layer. The method further comprises forming the metal layer and one of the at least two metal interconnect layers from substantially the same material.
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