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SINGLE IC-CHIP DESIGN ON WAFER WITH AN EMBEDDED SENSOR UTILIZING RF CAPABILITIES TO ENABLE REAL-TIME DATA TRANSMISSION
SINGLE IC-CHIP DESIGN ON WAFER WITH AN EMBEDDED SENSOR UTILIZING RF CAPABILITIES TO ENABLE REAL-TIME DATA TRANSMISSION
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机译:具有内置传感器的晶片上的单芯片IC芯片设计,利用RF功能实现实时数据传输
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摘要
An apparatus and method for real-time monitoring process conditions of a semiconductor wafer processing operation. A semiconductor wafer subject to processing in a wafer processing tool is embedded with one or more sensor devices. In response to receipt of wireless electromagnetic signals, the embedded sensor devices are activated for generating sensory data. The electromagnetic signals are further utilized to activate a transmitter device provided in the wafer to wirelessly transmit the sensory data generated from the activated embedded sensor device. The transmitted electromagnetic signals comprising the sensory data are communicated to a control device for controlling processing conditions of the process tool based upon the received sensory data.
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